Ion Beam Simulation Using a Lens System for Acceleration and Deceleration of Low Energy Ion Beam

Ion Beam Simulation Using a Lens System for Acceleration and Deceleration of Low Energy Ion Beam

The characteristics of electrostatic lens systems are studied with a view to applications in an ion-beam source. Rays are traced with the SIMION simulator, which offers a realistic description of space charge effects. Design of the lens system was done by using SIMION computer program. A parallel beam of singly charged nitrogen ions of diameter 10 mm with energy of 6 keV was started at a distance of 150 mm before entering the acceleration/ deceleration lens system. The lens system was optimized using the simulation data obtained with a SIMION computer program for calculating ion trajectories with and without space charge included. In order to design this lens system, we studied the two and three electrode lens systems with different parameters. Beam emittance as a function of the gap width of the deceleration lens system wasb studied for singly charged nitrogen ion trajectories downstream at 200 mm. Influence of the deceleration voltage on the deceleration electrode with different voltages of the four electrodes on the beam emittance was investigated with gap widths of 3, 5, 10, 15 and 21 mm. Deceleration lens system was used as an acceleration lens system by changing and optimising the voltage on each electroden of the lens system. Both the beam emittance and the beamb diameter were calculated at exit of the lens system at distance of 60 mm. The following calculations have been done with and without space charge.